Dr. Hans-Juergen Mann Profile

Dr. Hans-Juergen Mann

at Carl Zeiss SMT AG

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 18 March 2010 Paper

Optics for EUV production

Martin Lowisch, Peter Kuerz, Hans-Juergen Mann, Oliver Natt, Bernd Thuering

Proceedings Volume 7636, 763603 (2010) https://doi.org/10.1117/12.848624

KEYWORDS: Mirrors, Extreme ultraviolet, Projection systems, EUV optics, Optics manufacturing, Extreme ultraviolet lithography, Reticles, Coating, Wavefronts, Reflectivity

Read Abstract +

Proceedings Article | 15 October 2005 Paper

Reflective high-NA projection lenses

Hans-Jürgen Mann, Wilhelm Ulrich

Proceedings Volume 5962, 596214 (2005) https://doi.org/10.1117/12.625196

KEYWORDS: Mirrors, Reflectivity, Reflector telescopes, Lenses, Microscopes, Extreme ultraviolet, Relays, Optical design, Lithography, Monochromatic aberrations

Read Abstract +

Proceedings Article | 8 November 2000 Paper

Trends in optical design of projection lenses for UV and EUV lithography

Wilhelm Ulrich, Susanne Beiersdoerfer, Hans-Juergen Mann

Proceedings Volume 4146, (2000) https://doi.org/10.1117/12.406667

KEYWORDS: Mirrors, Combined lens-mirror systems, Lenses, Beam splitters, Lens design, Patents, Optical design, Lithography, Deep ultraviolet, Aspheric lenses

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years