Dr. Hao Luo Profile

Dr. Hao Luo

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Proceedings Article | 5 December 2024 Paper

Micro-cylindrical lens-assisted femtosecond laser ultra-fine nanostructure etching on silicon surface

Haifeng Gong, Lina Sun, Zhiyong Liu, Hao Luo, Xiaoduo Wang

Proceedings Volume 13418, 1341817 (2024) https://doi.org/10.1117/12.3047843

KEYWORDS: Nanowires, Silicon, Semiconducting wafers, Femtosecond phenomena, Laser frequency, Fabrication, Etching, Laser energy, Atomic force microscopy, Objectives

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Femtosecond laser direct writing technology is an advanced micro- and nano-fabrication technique widely used in the fabrication of semiconductor devices. To realize nano-fabrication, it is usually necessary to immerse a high-numericalaperture objective lens in water or oil to improve the focusing accuracy. However, the use of liquid media limits its wide application in semiconductor fabrication. The aim of this study is to develop a technique for nanoscale fabrication on silicon surfaces using femtosecond laser direct writing without the need for liquid immersion. In this work, a technique for modulating a tightly focused femtosecond laser using a micro-cylindrical lens is presented, which enables the fabrication of dual nanowires on a silicon surface in ambient air. By optimizing the height difference between the micro-cylindrical lens and the silicon wafer, the laser energy and the pulse frequency, a dual nanowire structure with a minimum feature size of 15 nm was prepared. The method is carried out in ambient air, simplifying the setup, and has potential application scenarios for affordable, ultra-high-precision, high-speed laser direct writing of semiconductors.

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