Dr. Helmut Schift Profile

Dr. Helmut Schift

Head polymer nanotechnology group at Paul Scherrer Institut

SPIE Involvement:

Author

Area of Expertise:

nanoimprint lithography , mold fabrication , roll embossing , 3D lithography , injection molding

Websites:

Company Website | Personal Website

Helmut Schift is head of the Polymer Nanotechnology Group in the Laboratory for Micro- and Nanotechnology at the Paul Scherrer Institut. He received his diploma in Electrical Engineering from the University of Karlsruhe, and performed his PhD studies at the Institute of Microtechnology Mainz. After his graduation in 1994, he joined PSI as a research staff member. His current research interests include innovative 3-D stamp fabrication and nanomolding processes, including roll embossing and injection molding.

SPIE Journal Paper | 6 January 2018

Benchmarking surface selective vacuum ultraviolet and thermal postprocessing of thermoplastics for ultrasmooth 3-D-printed micro-optics

Robert Kirchner, Nachiappan Chidambaram, Helmut Schift

OE, Vol. 57, Issue 04, 041403, (January 2018) https://doi.org/10.1117/12.10.1117/1.OE.57.4.041403

KEYWORDS: Vacuum ultraviolet, Polymethylmethacrylate, Polymers, Surface roughness, Surface finishing, Micro optics, Lenses, Glasses, Two photon polymerization, Polymerization

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Proceedings Article | 2 January 2018 Paper

Surface smoothening of the inherent roughness of micro-lenses fabricated with 2-photon lithography

Helmut Schift, Robert Kirchner, Nachiappan Chidambaram, Mirco Altana

Proceedings Volume 10456, 104561Z (2018) https://doi.org/10.1117/12.2283236

KEYWORDS: Lenses, Polymers, Surface roughness, Lithography, Polymethylmethacrylate, Surface finishing, Two photon polymerization, Microlens array, Microlens, Electron beam lithography

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Proceedings Article | 28 September 2017 Paper

Depth-profiling of vertical material contrast after VUV exposure for contact-free polishing of 3D polymer micro-optics

R. Kirchner, R. Hoekstra, N. Chidambaram, H. Schift

Proceedings Volume 10446, 1044613 (2017) https://doi.org/10.1117/12.2279712

KEYWORDS: Micro optics, Polymers, Ultraviolet radiation, Surface finishing, Polymethylmethacrylate, Lithography, Microlens, 3D microstructuring

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Proceedings Article | 21 March 2017 Presentation + Paper

Selective surface smoothening of 3D micro-optical elements

Helmut Schift, Nachiappan Chidambaram, Mirco Altana, Robert Kirchner

Proceedings Volume 10144, 101440B (2017) https://doi.org/10.1117/12.2256358

KEYWORDS: Lenses, Optical testing, Polymethylmethacrylate, Lithography, Surface roughness, Vacuum ultraviolet, Polymers, Microlens, Ultraviolet radiation, Glasses, Prisms, Scanning electron microscopy, Surface finishing, Absorption

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Proceedings Article | 24 February 2017 Presentation + Paper

How post-processing by selective thermal reflow can reduce the roughness of 3D lithography in micro-optical lenses

Robert Kirchner, Nachiappan Chidambaram, Mirco Altana, Helmut Schift

Proceedings Volume 10095, 1009507 (2017) https://doi.org/10.1117/12.2258090

KEYWORDS: Lenses, Polymethylmethacrylate, Polymers, Microlens, Nanoimprint lithography, Lithography, Microlens array, Two photon polymerization, Glasses, Electron beam lithography, Surface roughness, Micro optics, Manufacturing, Surface finishing, Vacuum ultraviolet

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Proceedings Article | 21 March 2016 Paper

mr-PosEBR: a novel positive tone resist for high resolution electron beam lithography and 3D surface patterning

Stefan Pfirrmann, Robert Kirchner, Olga Lohse, Vitaliy Guzenko, Anja Voigt, Irina Harder, Anett Kolander, Helmut Schift, Gabi Grützner

Proceedings Volume 9779, 977925 (2016) https://doi.org/10.1117/12.2219165

KEYWORDS: Plasma, Dry etching, Electron beams, Polymers, Scanning electron microscopy, Reactive ion etching

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SPIE Journal Paper | 18 July 2014

Nanoimprint lithography process chains for the fabrication of micro- and nanodevices

Helmut Schift, Prabitha Urwyler, Per Magnus Kristiansen, Jens Gobrecht

JM3, Vol. 13, Issue 03, 031303, (July 2014) https://doi.org/10.1117/12.10.1117/1.JMM.13.3.031303

KEYWORDS: Nanoimprint lithography, Polymers, Nanostructures, Cesium, Manufacturing, Silicon, Optical lithography, Polymer thin films, Thin films, Metals

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Proceedings Article | 28 March 2014 Paper

Nanoimprint lithography process chains for the fabrication of micro- and nanodevices

Helmut Schift

Proceedings Volume 9049, 90491E (2014) https://doi.org/10.1117/12.2048517

KEYWORDS: Polymers, Nanoimprint lithography, Manufacturing, Signal processing, Nanostructures, Polymer thin films, Glass molding, Silicon, Coating, Metals

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Proceedings Article | 4 April 2012 Paper

Micro- and nanostructured polymer substrates for biomedical applications

Jasmin Althaus, Prabitha Urwyler, Celestino Padeste, Roman Heuberger, Hans Deyhle, Helmut Schift, Jens Gobrecht, Uwe Pieles, Dieter Scharnweber, Kirsten Peters, Bert Müller

Proceedings Volume 8339, 83390Q (2012) https://doi.org/10.1117/12.915235

KEYWORDS: Polymers, Plasma, Nanostructures, Oxygen, Plasma treatment, Polymer thin films, Scanning electron microscopy, Bone, Tissues, Silicon

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SPIE Journal Paper | 1 January 2006

Sustained polymer membranes fabricated by nanoimprint lithography

Helmut Schift, Sandro Bellini, Uwe Pieles, Jens Gobrecht

JM3, Vol. 5, Issue 01, 011010, (January 2006) https://doi.org/10.1117/12.10.1117/1.2172993

KEYWORDS: Polymers, Nanoimprint lithography, Nanolithography, Etching, Photomicroscopy, Microfluidics, Silicon, Scanning electron microscopy, Nanotechnology, Applied sciences

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Proceedings Article | 2 September 1998 Paper

Fabrication of replicated high-precision insert elements for micro-optical bench arrangements

Helmut Schift, Juergen Soechtig, Fredy Glaus, A. Vonlanthen, S. Westenhoefer

Proceedings Volume 3513, (1998) https://doi.org/10.1117/12.324266

KEYWORDS: Optical fibers, Optical components, Polymers, Optical alignment, Metals, Optical benches, Diffractive optical elements, Silicon, Fiber couplers, Lithography

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Proceedings Article | 22 May 1998 Paper

Miniaturized focusing fan-out elements: design, fabrication, and characterization

Andreas Schilling, Philippe Nussbaum, Christian Ossmann, Silke Traut, Markus Rossi, Helmut Schift, Hans Peter Herzig

Proceedings Volume 3490, (1998) https://doi.org/10.1117/12.308971

KEYWORDS: Photoresist materials, Microlens, Fluctuations and noise, Optical components, Diffraction, Diffraction gratings, Microlens array, Optical alignment, Multiphoton lithography, Staring arrays

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Proceedings Article | 2 September 1997 Paper

Replicated diffractive optical lens components for laser-diode to fiber coupling in optical bench arrangements

Juergen Soechtig, Helmut Schift, Bruce Patterson, S. Westenhoefer

Proceedings Volume 3226, (1997) https://doi.org/10.1117/12.284573

KEYWORDS: Optical benches, Optical fibers, Single mode fibers, Fiber lasers, Diffractive optical elements, Laser applications, Optical components, Optical alignment, X-ray technology, Optical fabrication equipment

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Proceedings Article | 28 July 1994 Paper

Achieving mass fabrication of microoptical systems by combining deep-x-ray lithography, electroforming, micromolding, and embossing

Michael Abraham, Hans-Dieter Bauer, Wolfgang Ehrfeld, Mathias Gerner, Manfred Lacher, Heinz Lehr, Holger Loewe, Andreas Michel, Andreas Ruf, Helmut Schift, Andreas Schmidt, Lutz Weber

Proceedings Volume 2213, (1994) https://doi.org/10.1117/12.180982

KEYWORDS: Optical fibers, Polymers, Metals, Integrated optics, Lenses, Sensors, X-rays, Nickel, Lithography, X-ray lithography

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Showing 5 of 14 publications

Conference Committee Involvement (6)

Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS 2019

25 February 2019 | San Jose, California, United States

Novel Patterning Technologies 2018

26 February 2018 | San Jose, California, United States

Emerging Patterning Technologies 2017

27 February 2017 | San Jose, California, United States

Alternative Lithographic Technologies VIII

22 February 2016 | San Jose, California, United States

Alternative Lithographic Technologies VII

23 February 2015 | San Jose, California, United States

Showing 5 of 6 Conference Committees

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