Dr. Hiroki Yamamoto Profile

Dr. Hiroki Yamamoto

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Publications (1)

Proceedings Article | 21 November 2023 Poster + Paper

Comparison of photoresist sensitivity between KrF, EB, and EUV exposure

Yosuke Ohta, Atsushi Sekiguchi, Shinji Yamakawa, Tetsuo Harada, Takeo Watanabe, Hiroki Yamamoto

Proceedings Volume 12750, 1275018 (2023) https://doi.org/10.1117/12.2691211

KEYWORDS: Extreme ultraviolet lithography, Photoresist materials, Photoresist developing, Quantum correlations, Film thickness, Chemically amplified resists, Quantum experiments, Ultraviolet radiation, Quantum numbers, Electrons

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