Mr. Hiroyuki Hara Profile

Hiroyuki Hara

at Utsunomiya Univ

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Author

Publications (2)

Proceedings Article | 9 July 2015 Paper

Experimental observation of laser-produced Sn extreme ultraviolet source diameter for high-brightness source

Goki Arai, Hiroyuki Hara, Thanh-Hung Dinh, Atsushi Sunahara, Takeshi Higashiguchi

Proceedings Volume 9658, 96581A (2015) https://doi.org/10.1117/12.2192188

KEYWORDS: Extreme ultraviolet, Laser energy, Plasma, Tin, Pulsed laser operation, Picosecond phenomena, Metrology, Photomasks, Inspection, Nd:YAG lasers

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Proceedings Article | 9 July 2015 Paper

Evaluation of a dot target based high-brightness microplasma extreme ultraviolet (EUV) source by hydrodynamic simulation

Hiroyuki Hara, Goki Arai, Thanh-Hung Dinh, Atsushi Sunahara, Takeshi Higashiguchi

Proceedings Volume 9658, 96581B (2015) https://doi.org/10.1117/12.2192194

KEYWORDS: Extreme ultraviolet, Plasma, Pulsed laser operation, Tin, Ions, Picosecond phenomena, Tellurium, Opacity, Optical simulations, Numerical simulations

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