Ion Beam Figuring (IBF) has been used for nearly 20 years by several laboratories and companies as a highly deterministic method of final processing of ultra-precision optical elements. Nowadays, requirements for high precision optics demand to have full control over the ion beam, which includes both the ion beam profile and intensity. Electrostatic focusing using an Einzel lens setup provides a simple option to control the ion beam shape by changing voltage. This experimental study investigates the early stage development of an Einzel lens used to control an RF40 ion source. First results demonstrate the possibility to use an Einzel lens to control the ion beam profile and indicate possible future challenges this technology has to overcome when used in IBF machines.
The aim of this work is an exploration of the options for optical surface polishing using the Zeeko IRP 100 machine and raster kinematics suitable for free-form polishing. For this purpose, aspheric surfaces were polished in raster prepolishing mode and then in Precession raster 3D shape correction, which is based on the Dwell time tool movement control. It was found that shape accuracy can achieve the value of approximately 35 nm RMS. The main inaccuracy was caused by the mid-spatial frequencies generated by the kinematics of the applied tools, which also limited the achievable values of microroughness.
The aim of this study was to determine the optimal subaperture polishing procedure for aspherical surfaces on the Optotech MCP 250 CNC machine. Due to the fact that the CNC subaperture polishing process runs along well defined paths, certain frequencies develop on the polished surface, which can be limiting for the resulting microroughness. A proper sequence of polishing steps in different tool motion control modes can minimize these frequencies and help to substantially reduce microroughness. In this context, various tool motion control modes ("Spiral spindle mode", "Spiral axis mode" and "Raster mode") in combination with different tools were tested. The resulting microroughness values were observed in the defined mid-frequency and high-frequency areas. The best results, i.e. the lowest microroughness values were obtained using a combination of the processes "Ball spiral axis mode", "FEM raster mode", "spiral spindle 2D FEM correction mode" and "AFJ spiral axis mode"
This paper describes a quest to find simple technique to superpolish Zerodur asphere (55μm departure from best fit sphere) that could be employed on old fashion way 1-excenter optical polishing machine. The work focuses on selection of polishing technology, study of different polishing slurries and optimization of polishing setup. It is demonstrated that either by use of fine colloidal CeO2 slurry or by use of bowl-feed polishing setup with CeO2 charged pitch we could reach 0.4nm RMS roughness while removing <30nm of surface layer. This technique, although not optimized, was successfully used to improve surface roughness on already prepolished Zerodur aspheres without necessity to involve sophisticated super-polishing technology and highly trained manpower.
In recent times, resin bond grinding wheels have often been used for the precise grinding of aspheric surfaces. In this paper, the influence of changes in the circumferential speed of the resin bond grinding wheel on the microroughness of the produced surface and also on the volume of the structures and the scratches is presented. The article also discusses how the cutting wear of the tool affects the surface quality and shows the correlation between the circumferential speed and the rate of degradation of the resin bond grinding wheel. A circumferential speed interval from 12 m/s to 24 m/s was investigated and the effect of tool degradation was observed at 1.9-hour intervals. The results of the experiment show that the optimal circumferential speed of the tool lies around 20 m/s. At this speed, the tool produces a perfectly polishable surface and tool degradation is minimized.
The aim of this work was an investigation of surface microroughness and shape accuracy achieved on an aspheric lens by subaperture computer numeric control (CNC) polishing. Different optical substrates were polished (OHARA S-LAH 58, SF4, ZERODUR) using a POLITEX™ polishing pad, synthetic pitch, and the natural optical pitch. Surface roughness was measured by light interferometer. The best results were achieved on the S-LAH58 glass and the ZERODUR™ using the natural optical pitch. In the case of SF4 glass, the natural optical pitch showed a tendency to scratch the surface. Experiments also indicated a problem in surface form deterioration when using the natural optical pitch, regardless of the type of optical material.
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