Dr. Jean-Francois Hergott Profile

Dr. Jean-Francois Hergott

at CEA Saclay

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Publications (1)

Proceedings Article | 13 September 2002 Paper

PREUVE and the EXULITE project: modular laser-produced plasma EUV source

Tiberio Ceccotti, F. Chichmanian, D. Descamps, P. Haltebourg, Jean-Francois Hergott, S. Hulin, Didier Normand, Marc Segers, Olivier Sublemontier, Martin Schmidt, Philippe Cormont, M. Neu, Pierre-Yves Thro, Jean-Marc Weulersse, B. Barthod, R. Bernard, E. Veran, Jean-Marie Barbiche, Ph. D'Aux, E. Marquis

Proceedings Volume 4760, (2002) https://doi.org/10.1117/12.482115

KEYWORDS: Extreme ultraviolet, Xenon, Plasma, Extreme ultraviolet lithography, High power lasers, Laser development, Prototyping, Lithography, Laser systems engineering, Laser applications

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