Mr. Jeong-Heon Baik Profile

Jeong-Heon Baik

at Dongbu HiTek Co Ltd

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Author

Publications (2)

Proceedings Article | 10 May 2005 Paper

Investigation on the effect of metallic impurity Zn in solvent during photolithography process

Byoung-Tak Jeon, Ook-Hyun Kim, Jeong-Heon Baik, Jeong-Hyuk Ha, Il-Ho Lee, Weon-Sik Yang

Proceedings Volume 5752, (2005) https://doi.org/10.1117/12.598349

KEYWORDS: Zinc, Photoresist materials, Semiconducting wafers, Head-mounted displays, Lithography, Coating, Transition metals, Optical lithography, Spectroscopy, Deep ultraviolet

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Proceedings Article | 24 May 2004 Paper

Belly button reduction using optimized resist filtration method in CMOS gate pattern process

Jeong-Heon Baik, Dong-Jin Lee, Sung-Ho Lee, Sun-Hyung Park, Il-Ho Lee, Jae-Sung Choi

Proceedings Volume 5375, (2004) https://doi.org/10.1117/12.533895

KEYWORDS: Etching, Semiconducting wafers, Coating, Photoresist processing, Transistors, Particles, Inspection, Failure analysis, Critical dimension metrology, Reflectivity

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