Mr. Jeun Kee Chua Profile

Jeun Kee Chua

Student at Nanyang Technological Univ

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Publications (1)

SPIE Journal Paper | 1 December 2008

Modeling of subwavelength resist grating features fabricated by evanescent waves interference

Vadakke Matham Murukeshan, Jeun Kee Chua, Sia Kim Tan, Qunying Lin

OE, Vol. 47, Issue 12, 129001, (December 2008) https://doi.org/10.1117/12.10.1117/1.3041735

KEYWORDS: Photoresist materials, Lithography, Refractive index, Photoresist developing, Optical engineering, Interfaces, Computer simulations, 3D modeling, Prisms, Picture Archiving and Communication System

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