DUV light is of great importance in applications, including nanolithography, material science, and biology. Metasurfaces, comprising well-engineered nanoresonators, promise to improve DUV technologies due to their capability to manipulate light at the nanoscale. We present metasurfaces showing high-quality-factor resonance (high-Q) in the DUV range. We combined low-loss dielectric materials, resonance mode associated with the quasi-bound state in the continuum, and various device schemes to realize the DUV high-Q metasurfaces. We demonstrate metasurfaces with functionalities including imaging-based biosensing and high-Q optical charity. Fabrication and characterization of the high-Q metasurface will be reported. This work provides a platform to advance DUV nanophotonics in sensing, quantum optics, and nonlinear optics.
We showcase plasmonic metasurfaces employing silicon (Si) nanostructures tailored for deep ultraviolet (DUV) spectroscopy. Si exhibits plasmonic resonance owing to the photon-doping effect originating from interband transitions in the DUV range. Through careful design adjustments, our metasurface achieves strong field enhancement at ~260nm. We investigate potential applications of the reported Si void metasurfaces for surface-enhanced spectroscopy by leveraging the unique properties of our Si metasurface. This study expands the range of materials employed in DUV nanophotonics, unlocking opportunities across diverse fields such as biomedical analysis and nonlinear optics.
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