Mr. Johan K. van Seggelen Profile

Johan K. van Seggelen

at Technische Univ Eindhoven

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 18 August 2005 Paper

J. van Seggelen, P. Rosielle, P. Schellekens, H. Spaan, R. Bergmans, G. Kotte

Proceedings Volume 5879, 58790T (2005) https://doi.org/10.1117/12.614321

KEYWORDS: Calibration, Actuators, Optical spheres, Head, Ruby, Optical alignment, Servomechanisms, Interferometers, Metrology, 3D metrology

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Keywords/Phrases