Dr. John A. Yasaitis Profile

Dr. John A. Yasaitis

Engineering Manager at Analog Devices Inc

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 15 January 2003 Paper

Paper

Modular process for integrating thick polysilicon MEMS devices with submicron CMOS

John Yasaitis, Michael Judy, Tim Brosnihan, Peter Garone, Nikolay Pokrovskiy, Debbie Sniderman, Scott Limb, Roger Howe, Bernhard Boser, Moorthi Palaniapan, Xuesong Jiang, Sunil Bhave

Proceedings Volume 4979, (2003) https://doi.org/10.1117/12.478294

KEYWORDS: Microelectromechanical systems, Oxides, Etching, Chemical mechanical planarization, Metals, Semiconducting wafers, Silicon, Gyroscopes, Photoresist processing, Sensors

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Proceedings Volume Editor (3)

SPIE Conference Volume | 15 January 2003

Micromachining and Microfabrication Process Technology VIII

SPIE Conference Volume | 28 September 2001

Micromachining and Microfabrication Process Technology VII

SPIE Conference Volume | 25 August 2000

Micromachining and Microfabrication Process Technology VI

Conference Committee Involvement (3)

Micromachining and Microfabrication Process Technology VIII

27 January 2003 | San Jose, CA, United States

Micromachining and Microfabrication Process Technology VII

22 October 2001 | San Francisco, CA, United States

Micromachining and Microfabrication Process Technology VI

18 September 2000 | Santa Clara, CA, United States

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