Ju-Hyun Kang
at S&S TECH
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 23 September 2009 Paper
Ju-Hyun Kang, Han-Sun Cha, Sin-Ju Yang, Jin-Ho Ahn, Kee-Soo Nam
Proceedings Volume 7488, 748830 (2009) https://doi.org/10.1117/12.829878
KEYWORDS: Birefringence, Thin films, Heat treatments, Crystals, Oxygen, Immersion lithography, Doping, Tantalum, Photomasks, Sputter deposition

Proceedings Article | 1 November 2007 Paper
Ju-Hyun Kang, Han-Sun Cha, Sin-Ju Yang, Chul-Kyu Yang, Jin-Ho Ahn, Kee-Soo Nam, Jong-Min Kim, Manish Patil, Ik-Bum Hur, Sang-Soo Choi
Proceedings Volume 6730, 67304K (2007) https://doi.org/10.1117/12.746684
KEYWORDS: Air contamination, Ions, Nitrogen, Metals, Thin films, Photomasks, Chemical analysis, Inspection, Scanning probe microscopy, Quartz

Proceedings Article | 30 October 2007 Paper
Sin-Ju Yang, Han-Sun Cha, Ju-Hyun Kang, Chul-Kyu Yang, Jin-Ho Ahn, Kee-Soo Nam
Proceedings Volume 6730, 67300J (2007) https://doi.org/10.1117/12.746652
KEYWORDS: Chromium, Etching, Autoregressive models, Photomasks, Quartz, Dry etching, Oxides, Nitrogen, Interfaces, Ultraviolet radiation

Proceedings Article | 30 October 2007 Paper
Chul-Kyu Yang, Han-Sun Cha, Sin-Ju Yang, Ju-Hyun Kang, Jin-Ho Ahn, Kee-Soo Nam
Proceedings Volume 6730, 67301D (2007) https://doi.org/10.1117/12.746675
KEYWORDS: Thin films, Ions, Adsorption, Photomasks, Air contamination, Quartz, Silicon, Semiconducting wafers, Phase shifts, Contamination

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