Jun Zhao
at Shanghai Institute of Applied Physics
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 12 May 2015 Paper
Proceedings Volume 9510, 95100Y (2015) https://doi.org/10.1117/12.2178843
KEYWORDS: Diffraction gratings, Diffraction, Extreme ultraviolet, Multilayers, Mirrors, Reflectivity, Interfaces, Silicon, Crystals, Polarizability

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