Dr. Kai Dirscherl Profile

Dr. Kai Dirscherl

at Danish Fundamental Metrology Institut

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Author

Publications (5)

Proceedings Article | 5 April 2007 Paper

A new SEM CD operator verified against Monte Carlo simulations

C. Frase, D. Gnieser, K. Dirscherl, E. Buhr, H. Bosse

Proceedings Volume 6518, 65184P (2007) https://doi.org/10.1117/12.712503

KEYWORDS: Monte Carlo methods, Scanning electron microscopy, Critical dimension metrology, Computer simulations, Image acquisition, Scattering, Optical simulations, Electron beams, Convolution, Metrology

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Proceedings Article | 5 April 2007 Paper

Aspects and new developments on edge angle and edge profile metrology at PTB

Bernd Bodermann, Egbert Buhr, Alexander Diener, Kai Dirscherl, Gerd Ehret, Carl Georg Frase, Matthias Wurm

Proceedings Volume 6518, 65181X (2007) https://doi.org/10.1117/12.712137

KEYWORDS: Scanning electron microscopy, Metrology, Scatterometry, Atomic force microscopy, Photomasks, Sensors, Critical dimension metrology, Scatter measurement, Silicon, Polarization

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Proceedings Article | 9 November 2005 Paper

Calibration procedures and application of the PTB photomask CD standard

W. Häßler-Grohne, C.G. Frase, S. Czerkas, K. Dirscherl, B. Bodermann, W. Mirandé, G. Ehret, H. Bosse

Proceedings Volume 5992, 59924O (2005) https://doi.org/10.1117/12.632779

KEYWORDS: Calibration, Ultraviolet radiation, Photomasks, Scanning electron microscopy, Critical dimension metrology, Microscopy, Deep ultraviolet, Standards development, Chromium, Opacity

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Proceedings Article | 20 November 2003 Paper

Alternative measuring modes for scanning probe instrumentation

K. Koops, Kai Dirscherl

Proceedings Volume 5190, (2003) https://doi.org/10.1117/12.503069

KEYWORDS: 3D metrology, Scanning probe microscopy, Data acquisition, Inspection, Scanning probe microscopes, Calibration, Image analysis, Scanning tunneling microscopy, Image processing, Nanotechnology

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Proceedings Article | 20 November 2003 Paper

Developments on the NMi-VSL traceable scanning probe microscope

Kai Dirscherl, K. Koops

Proceedings Volume 5190, (2003) https://doi.org/10.1117/12.503082

KEYWORDS: Interferometers, Atomic force microscopy, Scanning probe microscopes, Control systems, Scanners, Clocks, Head, Feedback control, Feedback loops, Mirrors

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