Great potential in medical applications makes that micro robot has been researched by several research groups. In this research, we demonstrates shape memory alloy (SMA) based micro robot. SMA wire, which has 25 μm of diameter, is cut and patterned by focused ion beam milling to fabricate shape of robot. The robot consists of diamond-shaped structures contracted and relaxed by two-way shape memory effect, and cuboid features that contact to ground. The robot is powered by ultraviolet laser and actuated using photothermal effect. It can move forward with speed of 2.5 μm/s. We anticipate that the SMA usage in micro robot can expand flexibility of material selection and enhance its functionality.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.