Karolina Mothander
at Lund Univ
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 22 February 2021 Poster + Presentation + Paper
Proceedings Volume 11612, 116120W (2021) https://doi.org/10.1117/12.2583803
KEYWORDS: Silicon, Reactive ion etching, Plasma, Optical lithography, FT-IR spectroscopy, Etching, Scanning electron microscopy, Reflectometry, Reflectance spectroscopy, Polymers

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