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Kazuki Chiba
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Publications (1)
Proceedings Article | 17 June 2024 Presentation + Paper
Coating stress compensation and temporal evolution studies for ion beam sputtered thin films
Mathias Mende, Matthias Knobl, Masatoshi Shibata, Kazuki Chiba, David Ahlstrand, Michael Middleton, Ian Stevenson, Nathan Carlie, Jessica DeGroote Nelson
Proceedings Volume 13021, 1302109 (2024) https://doi.org/10.1117/12.3022924
KEYWORDS: Coating stress, Coating, Thin films, Thin film coatings, Sputter deposition, Annealing, Multilayers
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