Ms. Ke Xu Profile

Ke Xu

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Proceedings Article | 13 September 2012 Paper

Nondestructive metrology of layered polymeric optical materials using optical coherence tomography

Jianing Yao, Panomsak Meemon, Kye-Sung Lee, Ke Xu, Jannick Rolland

Proceedings Volume 8493, 849307 (2012) https://doi.org/10.1117/12.930071

KEYWORDS: Optical coherence tomography, Polymers, Metrology, Nondestructive evaluation, 3D metrology, 3D image processing, Refractive index, Interfaces, Signal detection, GRIN lenses

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In recent years, there has been an ever-growing interest in exploring novel, highly efficient optical materials to develop compact and effective optical components. The design and fabrication of high-performance optics require nondestructive metrology techniques to inspect the samples. We have investigated the capability of optical coherence tomography (OCT) to nondestructively characterize layered polymeric materials. Using a swept-source OCT system with a wavelength range of 1.25 - 1.41 μm, we achieved micron-scale three-dimensional visualization of the interior structures and details of the layered polymers. The 3D OCT imaging also enabled accurate identification of the locations of defects within the samples. Based on the imaging data, nondestructive metrology of the thickness of each observed layer was accomplished and the obtained layer thickness profiles over depth offered valuable feedback to the manufacturing process. Our results correlated well with light microscope observance, however caused no surface damage in comparison. In this paper we present the technique of nondestructive metrology enabled by OCT and discuss the experimental results on typical layered polymeric samples.

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