Mr. Kuo-Kuei Fu Profile

Kuo-Kuei Fu

at Nanya Technology Corp

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Publications (2)

Proceedings Article | 20 October 2006 Paper

Alternating PSM for sub-60-nm DRAM gate single exposure

Kunyuan Chen, Richard Lu, Kuo Kuei Fu, ChungPing Hsia, Chiang-Lin Shih, JengPing Lin

Proceedings Volume 6349, 63491T (2006) https://doi.org/10.1117/12.685295

KEYWORDS: Optical proximity correction, Lithography, Resolution enhancement technologies, SRAF, Photomasks, Semiconducting wafers, Scattering, Quartz, Etching, Phase shifts

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Proceedings Article | 20 May 2006 Paper

Advanced hybrid mask process development

Orson Lin, Jomarch Chou, K. K. Fu, Booky Lee, Richard Lu, Jerry Lu, Chiang-Lin Shi

Proceedings Volume 6283, 62831S (2006) https://doi.org/10.1117/12.681754

KEYWORDS: Etching, Photomasks, Chromium, Resolution enhancement technologies, Neodymium, Quartz, Image processing, Diffractive optical elements, Phase shifts, Binary data

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