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Li Yan
at Univ of Nebraska/Lincoln
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Publications (1)
Proceedings Article | 30 May 2003 Paper
Application of spectroscopic ellipsometry to characterization of optical thin films
John Woollam, Corey Bungay, Li Yan, Daniel Thompson, James Hilfiker
Proceedings Volume 4932, (2003) https://doi.org/10.1117/12.474854
KEYWORDS: Ellipsometry, Infrared radiation, Anisotropy, Spectroscopic ellipsometry, Thin films, Vacuum ultraviolet, Refractive index, Data modeling, Calibration, Infrared spectroscopy
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