Surface enhanced Raman spectroscopy is a vibrational spectroscopy technique that enhances molecular Raman signals through noble metal nanostructures, commonly used in biological or chemical analysis in the fields of food, environment, and medicine. The controllable, repeatable preparation of nano periodic structures with high-density hotspots is currently the research highlights. This article introduces the method of using ion beam evaporation deposition and ultra-thin dual pass anodized aluminum oxide (AAO) template to prepare low-cost, large-area periodic nanodots array SERS substrates, and simulates the absorption rates of gold nanodots array with different diameters. The surface enhanced Raman spectroscopy characteristics of the SERS substrates were tested and analyzed using Rhodamine 6G as the probe molecule. The results showed that the SERS substrate of gold nanodots with a diameter of 260nm and a thickness of 35nm prepared on Si substrate can detect 10-7mol/L of Rhodamine 6G. The enhancement effect of the periodic structure of the gold nanodots at 1361.555 cm-1 is 22 times that of ordinary gold films of the same thickness.
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