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Hao-Ling Yu
at McMaster Univ
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Publications (1)
Proceedings Article | 24 October 2012 Paper
Lateral diffusion epitaxy (LDE) of single crystal silicon with downward facing substrate
Luke H. L. Yu, Bo Li, Huaxiang Shen, Adrian Kitai
Proceedings Volume 8412, 84121N (2012) https://doi.org/10.1117/12.2001437
KEYWORDS: Silicon, Liquid phase epitaxy, Diffusion, Crystals, Indium, Chemical species, Semiconducting wafers, Epitaxy, Liquids, Oxides
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