Dr. Lutz Berthold Profile

Dr. Lutz Berthold

at Fraunhofer-Institut für Mikrostruktur von Werkstoffen und Systeme

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Publications (1)

Proceedings Article | 11 November 2022 Presentation

Material-specific high-resolution extreme ultraviolet microscopy using a high-order harmonic source

Wilhelm Eschen, Lars Loetgering, Vittoria Schuster, Robert Klas, Alexander Kirsche, Lutz Berthold, Michael Steinert, Thomas Pertsch, Michael Krause, Jens Limpert, Jan Rothhardt

Proceedings Volume PC12292, PC122920O (2022) https://doi.org/10.1117/12.2641705

KEYWORDS: Extreme ultraviolet, Microscopy, Ultraviolet radiation, Stars, Silicon, Silica, Scattering, Refractive index, Microscopes, Metrology

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