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Luxuan Cai
at Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF
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Publications (1)
Proceedings Article | 10 April 2024 Poster + Paper
Super-polished metallic freeform optics for EUV-application
Tatjana Porwol, Jan Kinast, Luxuan Cai, Ralf Steinkopf, Stefan Risse
Proceedings Volume 12953, 1295318 (2024) https://doi.org/10.1117/12.3010784
KEYWORDS: Chemical mechanical planarization, Optical surfaces, Freeform optics, Surface finishing, Manufacturing, Optics manufacturing, Metal optics, Magnetorheological finishing, Atomic force microscopy, Polishing, EUV optics
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