Mr. Marius Gerlach Profile

Marius Gerlach

at Julius-Maximilians-Univ. Würzburg

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 1 May 2023 Presentation + Paper

Marziogiuseppe Gentile, Marius Gerlach, Robert Richter, Michiel van Setten, John Petersen, Paul van der Heide, Fabian Holzmeier

Proceedings Volume 12498, 124980S (2023) https://doi.org/10.1117/12.2657702

KEYWORDS: Ions, Electrons, Extreme ultraviolet, Photons, Extreme ultraviolet lithography, Photoresist materials, Ionization, Molecules, Chemistry

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Keywords/Phrases