Dr. Martin Hermann
at Carl Zeiss SMT GmbH
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 14 May 2019 Presentation
Tomáš Burian, Vera Hájková, Libor Juha, Karel Saksl, Vojtech Vozda, Igor Makhotkin, Eric Louis, Siegfried Schreiber, Kai Tiedtke, Sven Toleikis, Barbara Keitel, Elke Plönjes, Mabel Ruiz-Lopez, Marion Kuhlmann, Thomas Wodzinski, Hartmut Enkisch, Martin Hermann, Sebastian Strobel, Rolf Loch, Ryszard Sobierajski, Iwanna Jacyna, Dorota Klinger, Marek Jurek, Jerzy Pelka, Gosse de Vries, Michael Störmer, Frank Scholze, Frank Siewert, Tobias Mey, Jaromír Chalupský
Proceedings Volume 11035, 110350P (2019) https://doi.org/10.1117/12.2524718
KEYWORDS: X-rays, Optical filters, X-ray lasers, Free electron lasers, Laser ablation, Aluminum, Silicon, Signal attenuation, Extreme ultraviolet, Metals

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