Mr. Masaki Chikahisa Profile

Masaki Chikahisa

at Osaka Univ

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Publications (2)

Proceedings Article | 1 November 2004 Paper

Application of wavelet analysis to lithography metrology

Jiro Imada, Koji Nakamae, Masaki Chikahisa, Hiromu Fujioka

Proceedings Volume 5607, (2004) https://doi.org/10.1117/12.571002

KEYWORDS: Wavelets, Line edge roughness, Signal to noise ratio, Photoresist materials, Scanning electron microscopy, Edge detection, Lithography, Wavelet transforms, Denoising, Interference (communication)

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Proceedings Article | 22 May 2003 Paper

Estimation of electron beam profile from SEM image by using wavelet multiresolution analysis

Masaki Chikahisa, Koji Nakamae, Hiromu Fujioka

Proceedings Volume 5011, (2003) https://doi.org/10.1117/12.474010

KEYWORDS: Wavelets, Electron beams, Scanning electron microscopy, Beam analyzers, Monte Carlo methods, Inspection, Optical simulations, Wavelet transforms, Defect detection, Imaging systems

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