Michael J. Walsh
Vice President of Business Development at Exogenesis Corp
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 23 November 2015 Paper
S. Kirkpatrick, M. Walsh, R. Svrluga, M. Thomas
Proceedings Volume 9632, 96321Y (2015) https://doi.org/10.1117/12.2196545
KEYWORDS: Surface finishing, Chemical species, Particles, Calcium, Polishing, Laser damage threshold, Sputter deposition, Laser induced damage, Data modeling, Laser processing, Ions, Argon

Proceedings Article | 31 October 2014 Paper
M. Walsh, K. Chau, S. Kirkpatrick, R. Svrluga
Proceedings Volume 9237, 92372I (2014) https://doi.org/10.1117/12.2076439
KEYWORDS: Chemical species, Surface finishing, Polishing, Sputter deposition, Radium, Crystals, Natural surfaces, Argon, Ions, Contamination

Proceedings Article | 18 March 2014 Paper
M. Walsh, K. Chau, S. Kirkpatrick, R. Svrluga, B. Piwczyk, F. Goodwin, D. Balachandran
Proceedings Volume 9048, 90480I (2014) https://doi.org/10.1117/12.2046686
KEYWORDS: Chemical species, Extreme ultraviolet, Photomasks, Sputter deposition, Surface roughness, Argon, Surface finishing, Ions, Polishing, Chemical mechanical planarization

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