In the present paper, two arm micromanipulator for handling and/or assembling of minute objects in a fixed view by use
of a pantograph mechanism is proposed and its performance is discussed. The pantograph mechanism has three
parallelogram in the mechanism. In case of the pantograph mechanism, when two input actuators of the pantograph
mechanism has a linear motion, one of the output link of the mechanism has a motion with constant orientation. And
when an input link of the mechanism has a circular motion and when the output link has an endeffector with same length
of a radius of the circular motion, the top position of the endeffector does not move. Therefore, if we use the manipulator
as cell treatment manipulator, the view of motion area of the top of the endeffector does not move, only the direction of
the output link of the endeffector can change like a circular motion. This motion is very useful for treating cells, electric
micro devices, etc. Then, first, the motion principle and the motion function of the mechanism are explained. Second, the
performance of the manipulator and, especially, the positioning precision of the manipulator are discussed.
In recent years, the researches about Micro/Nano Systems are down actively in the bio-medical research fields, DNA research fields, chemical analysis systems fields, etc. In the results, a new materials and new functions in the systems are developed. In this invited paper, Mechano-Micro/Nano Systems, especially, motion systems are introduced. First, the research activities concerning the Mechano-Micro/Nano Systems in the world(MST2003, MEMS2003 and MEMS2004) and in Japan(Researech Projects on Nanotechnology and Materials in Ministry of Education, Culture, Sports, Science and Technology) are shown. Secondary, my research activities are introduced. As my research activities, (1) a comb-drive static actuator for the motion convert mechanisms, (2) a micro-nano fabrication method by use of FAB(Fast Atom Beam) machines, (3) a micro optical mirror manipulator for inputs-outputs optical switches, (4) a miniature pantograph mechanism with large-deflective hinges and links made of plastics are discussed and their performances are explained.
Many studies on optical switches have been performed in an attempt to develop optical information networks to speed information technology. In reality, however, mirror manipulators cannot be applied to multiple input and output systems due to both insufficient output displacements by the mirror parts inside the manipulator, and the difficulty of designing structures and mechanisms suitable for multi-dimensional manipulation. The principal reasons for insufficient displacement are the high rigidity of the elastic parts compared to the available driving forces and the pull-in effect. Therefore, in order to develop optical switches capable of multiple input and output switching, we suggest a novel 2-DOF(degree of freedom) electrostatic microactuator. The actuator is composed of one mirror with four beams laid about it in a corkscrew pattern, with four corkscrew electrodes on the substrate below and one mirror support pyramid situated under the mirror. Using electrostatic force, one or more of the beams are attracted from their outer ends toward the substrate. The mirror is then tilted by an angle proportional to the attracted length along the beam. The inclination and direction of the mirror are determined by the combined attracted length of the four beams. In this work we derive the mathematical model for the corkscrew beam microactuator for optical switches and show that this mathematical model accurately simulates the device by comparison with finite element analysis results. We use this mathematical model for design of the microactuator. Further we show that the designed optical switch microactuator is capable of rotating the mirror from +32 to -32 degrees about two axes with a maximum operating voltage of 163 volts. Finally, stress analysis of the actuator shows that the generated stress in the structure is at most 369 MPa.
Studies on opticla switches have been researched and develoepd for optical information networks for a highly developed information technology society. In reality, however, a manipulator cannot apply for multi input and output due to a rather small output displacement at the mirror parts inside the manipulator. Therefore, in order to develop optical switches capable of switching to multi input and output, we suggested an electrostatic driving-type 2-DOF micro-manipulator that was composed of one mirror with four screw type beams, four screw type electrodes on a substrate and one mirror support pyramid situated under the mirror. One mirror with four screw tuype beams for support of the mirror and four screw electrodes on the substrate wiht a one mirror support pyramid were made sparately. In the final step of the manufacturing process, these two parts were combined. The four beams are able to move by the electrostatic forces between the screw beams and the four screw electrodes on the substrate. We call this four beam type actuator an electrostatic suction actuator. In the results, the micro mirror is capable of a large angular output displacement about plus or minus 30 degrees in theory. The mnaufactured mirro and beams and the manufactured screw electrodes and mirror support pyramid, respectively are manufactured. In this research, after having studied the shapes and dimensions of micro-manipulators capable of a large angular displacement based on theoretical analysis, we also discovered that the suggested micro-manipulator can have a large angular displacemtn through the use of the suction phenomena. Moreover, our study suggestd a manufactured mirror and beams, and the manufactured screw electrodes, and mirror support pyramid for the optical switch.
In this paper, a new surface mount system with parallel arrangement miniature manipulators is proposed for use in system downsizing. The miniature manipulator consists of a molded pantograph mechanism, which is composed of large deflective hinges and links, both made of the same materials. In order to create such systems, first, durability of the pantograph mechanism is to be confirmed by fatigue tests. Next, the input and output displacement characteristics of the pantograph mechanism are to be experimentally discussed. Finally, propriety of the proposed system should be confirmed.
In this study, we found electrochemical wetting on a surface of a silicon substrate by direct voltage. The surfaces of silicon substrates do not have good wettability in usual condition. We observed here that a wetting area between a silicon substrate and a ultrapure water drop on the silicon surface expanded and a contact angel became almost zero degrees when direct voltage was impressed. Voltages inducing wetting are various and are dependent on crystal directions of substrate surfaces, voltage directions, and so on. However, this phenomenon is irreversible for ultrapure water. Next, experiments using some solutions containing several kinds of ions instead of ultrapure water were conducted. In general, drops of the solutions spread by lower voltage than drops of ultrapure water. When a cathode is contacted to a substrate an anode is immersed in a drop of sodium sulfate solution, the spread of the drop occurs. Then, shrinkage is observed when the reverse voltage is applied. Surface tension is a dominant and important force to micro size structures. At last, we show some types of micro actuator using surface tension controlled electrically in order to apply these phenomena to MEMS.
In this paper, a basic mechanism of 3D micromechanisms is proposed by making use of number synthesis of mechanisms. The output point of the proposed mechanism can move in the vertical direction when two linear input points move in the inverse horizontal direction, and can move horizontal direction when two linear input points move in the same horizontal direction. The validity and the characteristics of the proposed mechanism are investigated theoretically and experimentally by using a polyethylene macromodel manufactured by a small modeling injection machine. Finally, an example of a micromechanism manufactured by semiconductor fine-machining technique is shown.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.