Mr. Minkyu Ji Profile

Minkyu Ji

at SAMSUNG Electronics Co Ltd

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Author

Publications (3)

Proceedings Article | 14 November 2007 Paper

Full-chip-based subresolution assist features correction for mask manufacturing

Ju-Mi Bang, Issei Masumoto, Min-Kyu Ji, Sung-Hoon Jang, Isao Aburatani, Ji-Hyun Choi, Sang-Gyun Woo, Han-Ku Cho

Proceedings Volume 6730, 67302F (2007) https://doi.org/10.1117/12.746349

KEYWORDS: SRAF, Photomasks, Critical dimension metrology, Manufacturing, Printing, Lithography, Inspection, Mask making, Control systems, Semiconductors

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Proceedings Article | 21 May 2007 Paper

Shot-based MRC flow by using full chip MRC tool

Min-Kyu Ji, Sung-Hoon Jang, Sung-Jun Son, Ji-Hyeun Choi, Sang-Gyun Woo, Han-Ku Cho

Proceedings Volume 6607, 66070V (2007) https://doi.org/10.1117/12.728945

KEYWORDS: Photomasks, Inspection, SRAF, Data conversion, Manufacturing, Optical proximity correction, Error analysis, Resolution enhancement technologies, Defect inspection, Electronics

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Proceedings Article | 5 November 2005 Paper

Optimized distributed computing environment for mask data preparation

Byoung-Sup Ahn, Ju-Mi Bang, Min-Kyu Ji, Sun Kang, Sung-Hoon Jang, Yo-Han Choi, Won-Tai Ki, Seong-Woon Choi, Woo-Sung Han

Proceedings Volume 5992, 599214 (2005) https://doi.org/10.1117/12.632427

KEYWORDS: Optical proximity correction, Computing systems, Photomasks, Distributed computing, Manufacturing, Resolution enhancement technologies, Databases, Data conversion, Data storage, Silver

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