Dr. Mitsuhiro Ishihara Profile

Dr. Mitsuhiro Ishihara

Electronics Unit at Takaoka Electric Manufacturing Co Ltd

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Publications (4)

Proceedings Article | 18 August 2018 Presentation + Paper

The dimensional measurement of micro objects using the linear scanning confocal surface shape measurement system

Tatsuya Hinago, Mitsuhiro Ishihara, Yukihiro Otani

Proceedings Volume 10749, 1074905 (2018) https://doi.org/10.1117/12.2319812

KEYWORDS: Confocal microscopy, Image acquisition, Semiconductors, Integrated circuits, Image processing, Edge detection, Image analysis, Reliability, Optical components, Photomasks

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SPIE Journal Paper | 1 June 1999

High-speed surface measurement using a non-scanning multiple-beam confocal microscope

Mitsuhiro Ishihara, Hiromi Sasaki

OE, Vol. 38, Issue 06, (June 1999) https://doi.org/10.1117/12.10.1117/1.602155

KEYWORDS: Confocal microscopy, Microscopes, Objectives, Inspection, Imaging systems, Image processing, Camera shutters, CCD image sensors, Image sensors, Semiconductors

Proceedings Article | 7 May 1999 Paper

Three-dimensional surface measurement using grating projection method by detecting phase and contrast

Mitsuhiro Ishihara, Yasuo Nakazato, Hiromi Sasaki, Masahito Tonooka, Masayuki Yamamoto, Yukitoshi Otani, Toru Yoshizawa

Proceedings Volume 3740, (1999) https://doi.org/10.1117/12.347778

KEYWORDS: Phase measurement, Phase shifting, Objectives, Confocal microscopy, CCD cameras, Glasses, Systems engineering, Optics manufacturing, Manufacturing, Inspection

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Proceedings Article | 30 June 1998 Paper

High-speed 3D shape measurement using a nonscanning multiple-beam confocal imaging system

Mitsuhiro Ishihara, Hiromi Sasaki

Proceedings Volume 3478, (1998) https://doi.org/10.1117/12.312975

KEYWORDS: Confocal microscopy, Microscopes, 3D metrology, Objectives, Imaging systems, Inspection, Image processing, CCD image sensors, 3D image processing, Image sensors

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