Mr. Naoto Sugino Profile

Naoto Sugino

at Sanko Gosei Ltd

SPIE Involvement:

Author

Publications (12)

Proceedings Article | 9 October 2018 Paper

Utilization of gas permeable metal plate for the purpose of reduction of transfer defect in MEMS electronic device

Takao Kameda, Naoto Sugino, Satoshi Takei, Makoto Hanabata

Proceedings Volume 10787, 107870Y (2018) https://doi.org/10.1117/12.2325321

KEYWORDS: Metals, Microelectromechanical systems, Confocal microscopy, Microscopes, Glasses, Electronic components, Ultraviolet radiation, Nanoimprint lithography, 3D printing, Lithography

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Proceedings Article | 9 October 2018 Paper

Internal structure of metal material with gas permeability function related to MEMS devices

Naoto Sugino, Takao Kameda, Satoshi Takei, Makoto Hanabata

Proceedings Volume 10787, 107870X (2018) https://doi.org/10.1117/12.2325315

KEYWORDS: Metals, Microelectromechanical systems, 3D printing, X-rays, Computed tomography, Nanoimprint lithography, Printing, Laser cutting, X-ray imaging, Digital cameras

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Proceedings Article | 19 March 2018 Paper

Nanoimprint lithography using gas permeable template II

Makoto Hanabata, Satoshi Takei, Shinya Nakajima, Naoto Sugino, Yoko Matsumoto, Atsushi Sekiguchi

Proceedings Volume 10584, 1058415 (2018) https://doi.org/10.1117/12.2295147

KEYWORDS: Ultraviolet radiation, Nanoimprint lithography, Silicon, Optical lithography, Oxygen, Quartz, Nanofibers, Scanning electron microscopy, Lithography, Industrial chemicals

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Proceedings Article | 31 August 2017 Paper

Temperature dependence of viscoelasticity of crystalline cellulose with different molecular weights added to silicone elastomer

Naoto Sugino, Shinya Nakajima, Takao Kameda, Satoshi Takei, Makoto Hanabata

Proceedings Volume 10354, 103541F (2017) https://doi.org/10.1117/12.2273503

KEYWORDS: Crystals, Silicon, Composites, Metals, Crystallography

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Proceedings Article | 31 August 2017 Paper

Temperature dependency of mechanical properties for crystalline cellulose added to silicone elastomer

Takao Kameda, Naoto Sugino, Satoshi Takei, Makoto Hanabata

Proceedings Volume 10354, 103541E (2017) https://doi.org/10.1117/12.2273464

KEYWORDS: Silicon, Crystals, Composites, Electronic components, Nanofibers, Solar cells, Antennas, Temperature metrology, Crystallography

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Proceedings Article | 31 August 2017 Paper

High resolution patterning of ultraviolet cross-linked resins using gas permeable mold derived from cellulose in nanoimprint lithography

Shinya Nakajima, Satoshi Takei, Makoto Hanabata, Naoto Sugino, Takao Kameda, Yoko Matsumoto, Atsushi Sekiguchi

Proceedings Volume 10354, 103541B (2017) https://doi.org/10.1117/12.2273270

KEYWORDS: Nanoimprint lithography

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Proceedings Article | 31 August 2017 Paper

Organic-inorganic hybrid resist materials in advanced lithography

Satoshi Takei, Naoto Sugino, Makoto Hanabata

Proceedings Volume 10354, 103541Q (2017) https://doi.org/10.1117/12.2275105

KEYWORDS: Nanoimprint lithography, Ultraviolet radiation, Nanostructures, Lithography, Natural surfaces, Photoresist processing, Contamination, Nanoelectronics

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Proceedings Article | 27 March 2017 Paper

Nanoimprint lithography using gas permeable template

Makoto Hanabata, Satoshi Takei, Shinya Nakajima, Naoto Sugino, Yoko Matsumoto, Atsushi Sekiguchi

Proceedings Volume 10146, 101461I (2017) https://doi.org/10.1117/12.2257095

KEYWORDS: Nanoimprint lithography, Quartz, Nanostructures, Ultraviolet radiation, Polymers, Optical lithography, Nanofibers, Adsorption, Silicon, Oxygen, Lithography, Liquids, Scanning electron microscopy, Line edge roughness

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Proceedings Article | 5 October 2016 Paper

Production and evaluation of measuring equipment for share viscosity of polymer melts included nanofiller with injection molding machine

Takao Kameda, Naoto Sugino, Satoshi Takei

Proceedings Volume 9985, 99852D (2016) https://doi.org/10.1117/12.2243417

KEYWORDS: Polymers, Lithography, Measurement devices, Metals, Sensors, Protactinium, Transducers, Eye, Temperature metrology, Molecules

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Proceedings Article | 5 October 2016 Paper

Approach of UV nanoimprint lithography using template with gas-permeable and gaseous adsorption for reduction of air-trapping issue

Satoshi Takei, Naoto Sugino, Takao Kameda, Shinya Nakajima, Makoto Hanabata

Proceedings Volume 9985, 99852C (2016) https://doi.org/10.1117/12.2243401

KEYWORDS: Nanoimprint lithography, Ultraviolet radiation, Photomasks, Adsorption, Optical lithography, Materials processing, Ultraviolet radiation, Optical lithography, Glucose, Oxygen, Resistance, Scanning probe microscopy

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Proceedings Article | 4 October 2016 Paper

Evaluation of the properties of the permeability film material using cellulose nanofibers

Naoto Sugino, Shinya Nakajima, Takao Kameda, Satoshi Takei, Makoto Hanabata

Proceedings Volume 9985, 99851I (2016) https://doi.org/10.1117/12.2243418

KEYWORDS: Nanofibers, Nanoimprint lithography, Transmittance, Lithography, Ultraviolet radiation, Nanotechnology, Transparency, Silicon, Optical lithography, Polymers

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Proceedings Article | 1 April 2016 Paper

Nanoimprint lithography using disposable biomass template

Makoto Hanabata, Satoshi Takei, Kigen Sugahara, Shinya Nakajima, Naoto Sugino, Takao Kameda, Jiro Fukushima, Yoko Matsumoto, Atsushi Sekiguchi

Proceedings Volume 9777, 97771G (2016) https://doi.org/10.1117/12.2217483

KEYWORDS: Nanoimprint lithography, Nanostructures, Ultraviolet radiation, Quartz, Polymers, Nanofibers, Nanotechnology, Lithography, Silicon, Scanning electron microscopy, Polymerization, Resistance, Oxygen, Materials processing

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Showing 5 of 12 publications

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