Single-etch grating couplers provide efficient light coupling from optical fibers to photonic waveguides while having a very low fabrication complexity. Here, the use of a coupling coefficient profile solution permits an efficient optimization of the grating apodization profile and yields a simulated -4.8 dB coupling at 1550 nm. A very compact way to reduce back-reflections by up to 8 dB, by inserting a simple anti-reflective section, is also numerically investigated. Some proximity effects and minimum features of the 248 nm deep-ultraviolet lithography had a detrimental effect on the fabricated designs and the best experimental results were -7.5 dB. Nonetheless, these gratings, requiring a single-etch step fabrication process, should be useful when using e-beam prototyping.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.