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Niek Kremers
at Raith Laser Systems BV
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Publications (1)
Proceedings Article | 26 September 2023 Presentation + Paper
High-resolution large-area patterning of photonic structures using a multibeam direct write laser lithography technology
Kahraman Keskinbora, Niek Kremers, Jan Aarts, Hendrik Postma, Viacheslav Vlasenko, Jacco Houter
Proceedings Volume 12667, 126670B (2023) https://doi.org/10.1117/12.2677334
KEYWORDS: Lithography, Laser applications, Scanning electron microscopy, Optical lithography, Photonic crystals, Nanotechnology, Metrology, Laser systems engineering, Packaging, Nanolithography
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