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Dr. P. Y. Hung
at SEMATECH Inc
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 19 March 2015 Paper
Potential application of tip-enhanced Raman spectroscopy (TERS) in semiconductor manufacturing
P. Hung, Thomas O'Loughlin, Aaron Lewis, Rimma Dechter, Martin Samayoa, Sarbajit Banerjee, Erin Wood, Angela R. Hight Walker
Proceedings Volume 9424, 94241S (2015) https://doi.org/10.1117/12.2175623
KEYWORDS: Raman spectroscopy, Gold, Silicon, Scanning electron microscopy, Metrology, Transmission electron microscopy, Etching, Atomic force microscopy, Particles, Spatial resolution
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