Dr. Payal Verma Profile

Dr. Payal Verma

at Samara State Univ

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Publications (5)

Proceedings Article | 30 December 2016 Paper

Anchored multi-DOF MEMS gyroscope having robust drive mode

Payal Verma, S. Khonina, V. Pavelyev, S. Fomchenkov, B. Uma

Proceedings Volume 10224, 102241D (2016) https://doi.org/10.1117/12.2267115

KEYWORDS: Microelectromechanical systems, Gyroscopes, Oscillators, Capacitance, Differential equations, Electronics, Communication engineering, Dynamical systems, Systems modeling, Consumer electronics

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Proceedings Article | 30 December 2016 Paper

3D simulation of silicon micro-ring resonator with Comsol

S. Degtyarev, V. Podlipnov, Payal Verma, S. Khonina

Proceedings Volume 10224, 102241L (2016) https://doi.org/10.1117/12.2266783

KEYWORDS: Optical filters, Microrings, Silicon, Resonators, Waveguides, Optical components, Integrated optics, Electromagnetic simulation, Sensors, Refractive index

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SPIE Journal Paper | 19 July 2016

Ultraviolet-LIGA-based fabrication and characterization of a nonresonant drive-mode vibratory gyro/accelerometer

Payal Verma, Khamar Zaman Khan, Svetlana Khonina, Nikolay Kazanskiy, Ram Gopal

JM3, Vol. 15, Issue 03, 035001, (July 2016) https://doi.org/10.1117/12.10.1117/1.JMM.15.3.035001

KEYWORDS: Sensors, Gyroscopes, Oscillators, Nickel, Prototyping, Capacitors, Microelectromechanical systems, Copper, Semiconducting wafers, Ceramics

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A dual-purpose nonresonant 2-degrees of freedom (DOF) drive-mode and 1-DOF sense-mode vibratory gyro/accelerometer fabricated using the economical ultraviolet-lithographie-galvanoformung-abformung (UV-LIGA) fabrication process using SU-8 photoresist is reported. The dual-purpose device presented is capable of detecting acceleration at the lower-frequency band and angular rate at the operating frequency band thereby functioning as both accelerometer and gyroscope. This is achieved by designing the structure such that the frequency response of the drive oscillator has two drive resonances with a flat zone between them, while the sense oscillator has one resonance, which is deliberately placed in the flat region between the two drive resonances. For angular rate detection, the device is operated in the flat zone at the sense resonance frequency at which the device is less susceptible to frequency variations due to both environmental variation and fabrication imperfections and hence is said to be operating in robust mode. The steady-state response and discrimination for angular rate and acceleration sensing have been devised using analytical modeling. The fabrication process is optimized to realize a gyro/accelerometer that has a 9-μm-thick nickel structural layer and 4-μm capacitive gaps. The overall miniature device size is 2.0 mm×1.9 mm. The experimental frequency response of the fabricated devices shows drive-mode resonances at 2.85 and 4.96 kHz and sense resonance at 3.85 kHz compared to the respective design values of drive-mode resonance frequencies 2.97 and 4.81 kHz and sense resonance frequency of 4 kHz. To demonstrate the dual-purpose capability of the device, acceleration characterization has been carried out and presented. The fabricated sensor is packaged in a ceramic package and interfaced with a MS3110 differential capacitive read out IC to characterize the acceleration response of the sensor, using an out-of-plane shaker. The bandwidth for acceleration detection is found to be 10 to 100 Hz and the sensitivity of the sensor at 30 Hz is found to be 57 mV/g.

Proceedings Article | 26 March 2016 Paper

Design and simulation of non-resonant 1-DOF drive mode and anchored 2-DOF sense mode gyroscope for implementation using UV-LIGA process

Payal Verma, Ram Gopal, M. Butt, Svetlana Khonina, Roman Skidanov

Proceedings Volume 9807, 98070D (2016) https://doi.org/10.1117/12.2231372

KEYWORDS: Gyroscopes, Microelectromechanical systems, MATLAB, Oscillators, Finite element methods, Photoresist materials, Environmental sensing, Sensors, Prototyping, Nickel, Navigation systems

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Proceedings Article | 26 March 2016 Paper

Fabrication of optical waveguides in RbTiOPO4 single crystals by using different techniques

M. Butt, M. Pujol, R. Solé, A. Ródenas, G. Lifante, M. Aguiló, F. Díaz, S. Khonina, R. Skidanov, P. Verma

Proceedings Volume 9807, 98070C (2016) https://doi.org/10.1117/12.2231368

KEYWORDS: Fabrication, Waveguides, Crystals, Laser crystals, Reactive ion etching, Ion exchange, Femtosecond phenomena, Cladding, Refractive index, Nonlinear crystals, Etching, Near field, Electro optics

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