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Peter Hark
Sales Manager at Sunex Inc
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Publications (1)
Proceedings Article | 6 December 2001 Paper
Compact high-power laser-plasma x-ray source for lithography
Celestino Gaeta, Harry Rieger, I. C. Edmond Turcu, Richard Forber, S. Campeau, Kelly Cassidy, Michael Powers, Robert Grygier, Juan Maldonado, G. French, Joe Naunguyan, Charles Kelsy, Peter Hark, James Morris, Richard Foster
Proceedings Volume 4502, (2001) https://doi.org/10.1117/12.449863
KEYWORDS: X-rays, X-ray sources, X-ray lithography, Plasma, Semiconducting wafers, Copper, Lithography, Pulsed laser operation, Laser systems engineering, Calibration
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