Richard DeLuca
at Zygo Corp
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 14 June 2023 Presentation + Paper
Proceedings Volume 12530, 125300C (2023) https://doi.org/10.1117/12.2663465
KEYWORDS: Silver, Corrosion, Metals, Protective coatings, Reflectivity, Optical coatings, Oxidation

Proceedings Article | 4 March 2022 Open Access Presentation + Paper
Proceedings Volume 11982, 119820C (2022) https://doi.org/10.1117/12.2610006
KEYWORDS: Antireflective coatings, Optical coatings, Laser induced damage, Laser damage threshold, Reflectivity, Optics manufacturing, Lithography

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