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Dr. Runzi Chang
at Marvell Semiconductor Inc
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 16 January 2003 Paper
Surface-micromachined tunneling-based accelerometer
Runzi Chang, Min She
Proceedings Volume 4981, (2003) https://doi.org/10.1117/12.472877
KEYWORDS: Electrodes, Silicon, Microelectromechanical systems, Oxides, Sensors, Transducers, Micromachining, Wafer bonding, Semiconducting wafers, Photoresist materials
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