Mr. Scott C. Olsen Profile

Scott C. Olsen

at Brigham Young Univ

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Publications (2)

Proceedings Article | 3 October 2022 Presentation + Paper

Carbon nanotube microfabricated window with extreme ultraviolet transmission and differential pumping

Scott Olsen, Richard Vanfleet, David Allred, Robert Davis

Proceedings Volume 12201, 1220102 (2022) https://doi.org/10.1117/12.2631989

KEYWORDS: Plasmas, Extreme ultraviolet, Carbon nanotubes, Helium, Microfabrication, Carbon, Systems modeling, MATLAB, Light emitting diodes, Diffraction

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Proceedings Article | 21 August 2020 Presentation + Paper

A carbon nanotube structure for an EUV window with differential pumping

Scott Olsen, Richard Vanfleet, David Allred, Steve Turley, Robert Davis

Proceedings Volume 11491, 1149104 (2020) https://doi.org/10.1117/12.2569049

KEYWORDS: Optical collimators, Extreme ultraviolet, Carbon nanotubes, Plasma, Lamps, Photodiodes, Plasma etching, Helium, Semiconducting wafers, Scanning electron microscopy

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