Mr. Seddy Chu Profile

Seddy Chu

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Publications (1)

Proceedings Article | 22 February 2021 Poster + Presentation + Paper

A novel method of overlay variation study for 3D NAND channel hole

Leeming Tu, Haydn Zhou, Erik Xiao, Jin Zhu, Cynthia Li, Ningqi Zhu, Xin Li, Jason Pei, Miao Bing, Seddy Chu, Kevin Huang, Bob Dong

Proceedings Volume 11611, 116112W (2021) https://doi.org/10.1117/12.2583760

KEYWORDS: Etching, Statistical analysis, Semiconducting wafers, Overlay metrology, Process control, Photomasks, Optical alignment, Opacity, Metrology, Feedback control

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