Dr. Seul-Gi Kim Profile

Dr. Seul-Gi Kim

Senior Researcher at Korea Electronics Technology Institute

SPIE Involvement:

Author

Area of Expertise:

graphene synthesis , EUV pellicle , nano graphite film preparation , film deposition and crystallization

Publications (1)

Proceedings Article | 18 March 2016 Paper

Study of nanometer-thick graphite film for high-power EUVL pellicle

Mun Ja Kim, Hwan Chul Jeon, Roman Chalykh, Eokbong Kim, Jihoon Na, Byung-Gook Kim, Heebom Kim, Chanuk Jeon, Seul-Gi Kim, Dong-Wook Shin, Taesung Kim, Sooyoung Kim, Jung Hun Lee, Ji-Beom Yoo

Proceedings Volume 9776, 97761Z (2016) https://doi.org/10.1117/12.2218228

KEYWORDS: Extreme ultraviolet lithography, Pellicles, Silicon, Extreme ultraviolet, Graphene, Crystals, Transmittance, Silicon films, Thin films, Lithography, Hydrogen, Infrared lasers, Thermography

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