Prof. Seunghun Hong
at Seoul National Univ
SPIE Involvement:
Author
Publications (1)

SPIE Journal Paper | 3 May 2018 Open Access
Jiyeah Rhie, Dukhyung Lee, Young-Mi Bahk, Jeeyoon Jeong, Geunchang Choi, Youjin Lee, Sunghwan Kim, Seunghun Hong, Dai-Sik Kim
JM3, Vol. 17, Issue 02, 023504, (May 2018) https://doi.org/10.1117/12.10.1117/1.JMM.17.2.023504
KEYWORDS: Photoresist materials, Etching, Scanning electron microscopy, Metals, Atomic layer deposition, Ion beams, Chromium, Photomasks, Gold, Lithography

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top