Sheng Liu
at New Jersey Institute of Technology
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 18 February 2008 Paper
Sheng Liu, Reginald Farrow, James Zunino, Hee Lim, John Federici, Gordon Thomas
Proceedings Volume 6884, 68840I (2008) https://doi.org/10.1117/12.763740
KEYWORDS: Sensors, Silicon, Capacitors, Low pressure chemical vapor deposition, Metals, Plasma enhanced chemical vapor deposition, Silicon films, Reactive ion etching, Etching, Silica

Proceedings Article | 12 February 2008 Paper
Sheng Liu, Reginald Farrow, James Zunino, Hee Lim, John Federici, Gordon Thomas
Proceedings Volume 6886, 688606 (2008) https://doi.org/10.1117/12.763795
KEYWORDS: Sensors, Silicon, Capacitors, Low pressure chemical vapor deposition, Metals, Plasma enhanced chemical vapor deposition, Finite element methods, Optical lithography, Photomasks, Silica

Proceedings Article | 30 August 2004 Paper
Kangzhu Guo, Haijiang Ou, Thomas Grycewicz, Abhay Joshi, Xinde Wang, Gordon Thomas, Haimin Wang, Richard Greene, Durga Misra, Sheng Liu, Zhiwei Liu, Jianjun Zhen, Xiaodong Wang, Baoqing Li, Zhixiong Xiao, Nicholas Ciampa, Jan Opyrchal, Halina Opyrchal, Ken Chin
Proceedings Volume 5406, (2004) https://doi.org/10.1117/12.542662
KEYWORDS: Staring arrays, Signal detection, Indium gallium arsenide, Modulation, Sensors, Detector arrays, Amplifiers, Phase shift keying, Capacitors, Physics

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