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Dr. Shengli Fan
Senior Design Engineer at ASML
SPIE Involvement:
Author
Area of Expertise:
Computational Lithography , Computational Imaging , Optical Imaging , Diffraction Tomography , Inverse Scattering & Reconstruction Algorithm , Biological and Biomedical Imaging
Profile Summary
My previous research work includes optical diffraction tomography, aiming at the reconstruction of multiply-scattering objects. Now I am a design engineer, focusing on computational lithography. The areas I am interested in are source-mask optimization, optical proximity correction, optical imaging formation, EUV optics.
Publications (4)
Proceedings Article | 5 March 2021 Presentation
Deep learning for high-quality imaging and accurate classification of cells through Anderson localizing optical fiber
Axel Schülzgen, Jian Zhao, Shengli Fan, Jose Enrique Antonio-Lopez, Rodrigo Amezcua Correa, Xiaowen Hu
Proceedings Volume 11703, 117030Q (2021) https://doi.org/10.1117/12.2578621
KEYWORDS: Optical fibers, Imaging systems, Image restoration, Image classification, Tissues, Spatial resolution, Microscopy, Medical research, Medical diagnostics, In vivo imaging
Proceedings Article | 11 March 2020 Presentation
Optimization-based optical diffraction tomography with spatially incoherent illumination (Conference Presentation)
Proceedings Volume 11249, 112490D (2020) https://doi.org/10.1117/12.2546625
KEYWORDS: Tomography, Diffraction, Optical tomography, Algorithm development, Sensors, Detection and tracking algorithms, Reconstruction algorithms, Phase imaging, 3D image processing, 3D metrology
Proceedings Article | 11 March 2020 Presentation
Optical diffraction tomography with deep-field match optimization (Conference Presentation)
Proceedings Volume 11249, 112490E (2020) https://doi.org/10.1117/12.2544010
KEYWORDS: Diffraction, Optical tomography, Tomography, Reconstruction algorithms, Detection and tracking algorithms, Optimization (mathematics), Optical imaging, Biomedical optics, Multiple scattering, Scattering
SPIE Journal Paper | 1 August 2013 Open Access
Quadratic spatial solitons generated in periodically poled lithium tantalite
Wenjun Liu, Gang Yang, Xiang Lin, Lihui Pang, Shengli Fan
OE, Vol. 52, Issue 08, 087103, (August 2013) https://doi.org/10.1117/12.10.1117/1.OE.52.8.087103
KEYWORDS: Solitons, Spatial solitons, Lithium, Crystals, Diffraction, Optical engineering, Femtosecond phenomena, Nonlinear optics, Laser crystals, Second-harmonic generation
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