Mr. Stephan Lange Profile

Stephan Lange

at FEP

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 25 February 2004 Paper

Silicon oxynitride rugate filters grown by reactive pulse magnetron sputtering

Hagen Bartzsch, Stephan Lange, Peter Frach, Klaus Goedicke

Proceedings Volume 5250, (2004) https://doi.org/10.1117/12.513332

KEYWORDS: Silicon, Refractive index, Optical coatings, Optical filters, Reflectivity, Sputter deposition, Antireflective coatings, Oxygen, Oxides, Coating

Read Abstract +

Optical inhomogeneous gradient films have been produced by reactive pulse magnetron sputtering of a silicon target in a variable mixture of the reactive gases oxygen and nitrogen. The presented coating system allows the automatic deposition of the gradient films with predefined, freely varying refractive index at a deposition rate of 1 nm/sec uniformly across 8” diameter. This system has been used for deposition of antireflective coatings, rugate filters, edge filters and dichroic filters composed of Si_xO_yN_z films with both gradient and sharp transitions between oxide and nitride. The deposited antireflective coatings consist of one gradient and one homogeneous layer and have a reflectivity of less than 0.5% in the wavelength range between 440 and 620 nm. Thermal substrate load during deposition of these coating is considerably lower than for deposition of conventional multilayer of silicon and titanium oxide. An example of a deposited simple narrow band rugate filter has 45 cycles of sinusoidal refractive index modulations between 1.67 and 1.95, resulting in a reflectivity of > 99.9% at 550 nm with a half-power bandwidth of 42.5nm and an average transmission of 95% in the remaining visual spectral range. The produced edge and dichroic filters consist of quarter-wave oxide and nitride layers. All films have been deposited at one sputtering station without interruption of the plasma thus guaranteeing a very stable, reproducible and highly efficient process.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years