Ms. Stephanie Baclet Profile

Stephanie Baclet

Senior Technical Marketing Engineer at Oxford Instruments Plasma Technology Ltd

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Publications (2)

Proceedings Article | 29 March 2021 Presentation + Paper

Towards AR waveguides with refractive index 2.0 utilizing nanoimprint lithogrpahy

Martin Eibelhuber, Christine Thanner, Dominik Treiblmayr, Sebastien Pochon, W. Frost, Joao Ferreira, David Pearson, Stephanie Baclet

Proceedings Volume 11765, 117650H (2021) https://doi.org/10.1117/12.2579505

KEYWORDS: Refractive index, Augmented reality, Waveguides, Nanoimprint lithography, Etching, Polymers, Glasses, Nanostructures, Photorefractive polymers, Optics manufacturing

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Proceedings Article | 23 March 2020 Paper

Low damage etching by Inductively Coupled Plasma Reactive Ion Etch (ICP-RIE) and Atomic Layer Etching (ALE) of III-V materials to enable next generation device performance

Mark Dineen, Matthew Loveday, Andy Goodyear, Mike Cooke, Andrew Newton, Stephanie Baclet, Craig Ward, Tania Hemakumara

Proceedings Volume 11329, 113290I (2020) https://doi.org/10.1117/12.2558732

KEYWORDS: Etching, Gallium nitride, Plasma, Semiconducting wafers, Argon, Reactive ion etching, Field effect transistors, Chlorine

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