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Stephen Lozowski
at Veeco Instruments Inc
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Publications (1)
Proceedings Article | 31 October 2022 Poster
Advancements in Mo/Si deposition techniques for high volume manufacturing of EUV mask blanks
Katrina Rook, Ashish Kulkarni, Antonio Checco, Kenji Yamamoto, Russell Luberoff, Mario Roque, Stephen Lozowski, Joel Bahena, Marjorie Chee, Meng Lee
Proceedings Volume PC12292, PC122920X (2022) https://doi.org/10.1117/12.2641798
KEYWORDS: Extreme ultraviolet, High volume manufacturing, Ions, Ion beams, Silicon, Reflectivity, Photomasks, Motion controllers, Molybdenum, Manufacturing
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