Stephen Trewick
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 12 May 2015 Paper
Christopher Fredricksen, Seth Calhoun, Stephen Trewick, Aubrey Coffey, Edward Dein, Kevin Coffey, Robert Peale, Joseph LaVeigne, Gregory Franks, Tom Danielson, John Lannon, Scott Goodwin
Proceedings Volume 9452, 94520X (2015) https://doi.org/10.1117/12.2177025
KEYWORDS: Etching, Resistance, Infrared radiation, Silicon, Dielectrics, Metals, Semiconducting wafers, Dry etching, Resistors, Mid-IR

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